|
DRUM >
Theses and Dissertations from UM >
UM Theses and Dissertations >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1903/2054
|
| Title: | A study of optical properties and current emission processes of gas phase field ionization sources |
| Authors: | Liu, Xuefeng |
| Advisors: | Orloff, Jon H |
| Department/Program: | Electrical Engineering |
| Type: | Dissertation |
| Sponsors: | Digital Repository at the University of Maryland
University of Maryland (College Park, Md.) |
| Keywords: | Engineering, Electronics and Electrical (0544) |
| Issue Date: | 24-Nov-2004 |
| Abstract: | Field emission ion sources are extremely important for producing high-resolution ion beams essential for several fields of research and especially for semiconductor manufacturing. Although most sources used are based on liquid metals they cannot produce beams of H, He or other noble gases, so that gas field ionization sources (GFIS) could have great utility for microscopy or applications sensitive to metal contamination (such as in-line processing). This dissertation explores the properties of the gas field ionization source with the goal of providing a resource to the ion column designer. For the first time a detailed treatment of the optics of the gas field ionization source is derived. Also, the first theoretical analysis of the current generation mechanism is presented that explains both the current-voltage characteristic and the total current of the GFIS with reasonable agreement with experiment.
The optical properties in the emission diode region are derived from the ray equat... |
| URI: | http://hdl.handle.net/1903/2054 |
| Appears in Collections: | Electrical & Computer Engineering Theses and Dissertations
UM Theses and Dissertations
|
Files in This Item:
| File |
Description |
Size | Format | No. of Downloads |
|---|
| umi-umd-2015.pdf | | 584Kb | Adobe PDF | 161 | View/Open |
|
Show full item record
All items in DRUM are protected by copyright, with all rights reserved.
|
